File:Fraunhofer IPMS 2D-Mikroscanner-Modul.jpg
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Deutsch: Beispiel für einen 2D-Mikroscanner vom Fraunhofer IPMS. Zu sehenen ist ein elektrostatischer 2D-Mikroscanner mit einer quasistatisch betriebenen Antriebsachse von bis zu ±8° statischer Auslenkung @ 120 V und einer resonant angetriebenen Achse mit einer nominalen Amplitude von ±9,5° @ 23,5 kHz & 160 V in einem DIL20-Gehäuse |
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This is a retouched picture, which means that it has been digitally altered from its original version. Modifications: croped. The original can be viewed here: Beispiele für Fraunhofer IPMS Mikroscanner.jpg:  . Modifications made by Cepheiden.
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This image is a derivative work of the following images:
- File:Beispiele_für_Fraunhofer_IPMS_Mikroscanner.jpg licensed with Cc-by-sa-3.0
- 2011-06-06T09:26:01Z Positiveimpact 1209x604 (115217 Bytes)
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Category:MEMS Category:Microscanner